BN99 Polishing Plates&Rings

BN99 Polishing Plates&Rings

We provide standard products & tailor-made products for hot-pressed boron nitride ring. Except for pure BN99 ring, we also supply BN composites with silicon carbide, calcium borate, aluminum nitride and zirconia, to fulfill various of demand for the customers. Check the boron nitride specifications for our pure BN99 and zirconia composite material ZSBN.

Main aoolications:

• Components for semiconductor equipment

• Plates, Wafer, Rings, Gas distribution plates, Nozzles
• Top nozzles or Baffles, Pedestal heaters, Cover plates
• RF windows, Crucibles

• Substrate
• Heat resistant base materials

Key Features & Specifications

• Utilizes hot pressing technology
• Up to diameter of 650mm
• Very low porosity
• High themal conductivity
• Ultra chemical resistant
• Direct sintered to allow for net shape sintering